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            Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering

            來源:  華匯儀器   作者:  管理員   時間:  2021-09-08  點(diǎn)擊:   1295 次


            Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering.pdf


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